Spares from: SVG, SVG Thermco (Aviza), |
SVG | |||
Part No. not known | Valve, check, 1/8" lift (Swagelock/Whitey) |
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Part No. not known | Transformer, 230/115v input, 12.6V/2A or 6.3v 4A output |
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Part No. not known | Transformer, 230/115v input, 16V/1.5A or 8v 3A output |
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06-262-24C | PCB, Pre-amp Centre MET |
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06-32331-00 | Shaft, developer |
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06-95076-02 | Valve, Vacuum 2-S |
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06710-01 | Guide, DEV shield |
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06719-01 | Seal, top |
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06728-01 | Spindle, Lift Plat |
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088056-00 | Lamp, ultra-violet, ozone |
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0923001EO1 | Fuse holder, SVG |
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103-6388 | Transistor, PNP, Darlington, 120V, 50A |
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107-004 | Relay, 24VDC, 3PDT (3pole c/o), 10A@240VAC |
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109-003 | Switch, Air Pressure |
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109-102 | Relay, Solid State, 90-280V Input, 240VAC, 25A, Output Switch |
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111-002 | Lamp, 6V |
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111/046 | Fuse, 250mA, 250V, SB |
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112-007 | Brush, for SVG 11 |
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114-024 | Valve, Solenoid 024 SVG, N3201A, 24VDC, 8.5W |
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114-025 | Valve, Solenoid 025, 24VDC, 8.5W, 0-100 PSIG, MINI-MYTE |
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114-045 | Valve, Develop Car |
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11959-01 | Insert. Catch Cup |
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120-296-000 | Circlip, External 7 x 0.1 (0.275" x 0.04") |
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121115 | Thermocouple, Torch |
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122-295-170 | Water Connection |
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122900-001 | Boat Loader Board |
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13408/04 | Chuck, wafer, MHP, 150mm |
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141250-001 | Tape Drive Thermco |
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14506-01 | Nozzle, Bath tip P |
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14508-01 | Pivoting tub DUNK |
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14510-01 | Shaft, bath pivot |
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147298-001 | Power Supply, Thermco, 115VAC, 24V, 2A o/p |
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15389-01 | Resist Coater CAT |
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15752/01 | Bushing, CCR |
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15851-01 | Cup, Rinse. ROSS |
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16111-02 | Shaft, Developer |
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16188-01 | Pin, Wafer chill PLT |
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16195-01 | Coupling, Modified Rev A |
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16217-01 | Pin, Wafer HPD |
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16269-01 | Arc shaft |
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17-05114 | PCB, Extender Card |
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17-16813-01 | PCB, Extender card |
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17-46132-01 | Kit, upgrade for linear bearings/shafts on all 8626, 8642, 8826, SMC, and 8842 pivoting mo inb dispense systems |
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17215-01 | Catch Cup Sog Top |
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17215-02 | Catch Cup Top pivot |
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17276-01 | Nut, locking, knurled |
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17530/02 | Nozzle |
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18258-01 | Spindle, down stop |
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19108-01 | Chuck, Scrub 1 |
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201-007 | Seal, bushing ball, 3/8" |
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201-093 | Wheel, Guide rail S |
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201-095 | Bushing, wheel guide |
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20118-10-168 | Meter, Power input |
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202-003 | O-Ring, 40x2.5, 1.8x0.103" Polyurethane Jointed |
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202-023 | O-Ring, 52.07x2.62, Polyurethane |
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202-161 | O-Ring, 247.32x2.62 SVG |
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202-186 | O-Ring, 202.87x2.62 SVG |
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202/254 | Belt, timing, C5-6-4 |
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202/278 | Belt, Geareg Pulley, |
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202/283 | O-ring, 2x2, Teflon |
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203-020 | Cylinder, SVG P/C pump |
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205-252 | Bumper, lift plate |
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205-453 | Washer, curved, spring. 3/8"id, 7/8"od |
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206/001 | Adaptor, brass |
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206/247 | Ferrule, coater, teflon |
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206/468 | Quick disconnect coupling |
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206/470 | Coupling |
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206/490 | Quick disconnect coupling insert |
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206/621 | Quick disconnect coupling |
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206/666 | Elbow, 10-32x1/8T, Barb Nylon |
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206/850 | Coupling, flexible with clamps |
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207/004 | Gasket |
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209-102 | Switch, Float |
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212-002 | Tubing 1.58mm 1/16", Blue Polyurethane |
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212/013 | Tubing, Polyurethane, Red, 1/8" OD, 1/16 ID, 100' |
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213-015 | Valve, MRTG. 1/8 N |
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213-042 | Valve, P/C 042 SVG |
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213-139 | Valve, 3way, pneumatic, teflon |
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214-095 | Spacer, 12 X 18 X 0 |
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215-156 | Coupling, rigid |
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219-093 | Pump, Magnet, 220V/240V, 50/60Hz, 0.55A |
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220-026 | Pulley, 026 SVG |
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322114EO1 | O-Ring, 9.19x2.62 Polyurethane |
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3221488EO1 | Shaft Seal 0.88/0.50x0.125" (22.35/12.7x3.175) for Ball Bushing |
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3221492EO1 | V-Ring 20/14x5.5 V 16 A |
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3221494EO1 | Shaft Seal 6/11x3.5 PTFE |
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3221495EO1 | Gasket, Seal 11/39x1 VP Carrier SVG |
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3222115EO1 | O-Ring, 15.6x1.78, Viton |
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3222162EO1 | O-Ring, 164.77x2.62, jointed Polyurethane |
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3222163EO1 | O-Ring, 35x2.5, 1.674x0.103" Jointed Polyurethane |
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3224654EO1 | Gasket, Seal 10/16x1.78 VPO Shaft SVG |
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4521547EO1 | Pulley, 027 SVG |
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500454-001 | Coupling, universal, Encoder ML-18-A T |
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5921709EO1 | Brush, Motor SVG 007 |
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600051-01 | PCB, Analogue input VTR |
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600053-01 | PCB, Analogue output |
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604101 | Catch Cup Bottom |
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6421725EO1 | Panel, control PC |
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6421726EO1 | Panel, control SSC |
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644-0327-014 | Drive Carriage Assy PE, Type- HEM 3512-12, 1000 cycles, |
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644-0751-001 | PCB, Pre-amp gain 1mm PE |
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644-4509-004 | Gear, carriage drive PE |
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644-5567-002 | Carriage DR isolator PE |
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644-6813 | Block aligner 6813 PE |
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673408 | Chuck, developer |
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677-0483-001 | Disc Encoder |
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677-0551 | Carrier, Mask 5" x 5" x 090 |
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680-0130-017 | Heater |
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681-0023-010 | Lamp, RF interface |
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681-0023-013 | Lamp, AC |
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681-0117-010 | Thermostat |
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681-0191-001 | Feedthrough Housing |
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682-0033-001 | O-Ring, 2.9x1.78, Nitrile |
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682-0038-075 | Ferrule |
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682-0049-044 | Ring, retaining |
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682-0072-003 | Shaft, worm carriage drive, PE |
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682-0079-005 | Flat Washer |
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682-0135-002 | Worm carriage drive PE |
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682-0148-111 | Spherical Washer |
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682-0159-009 | Clamp, Pressure shaft PE |
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682-0170-502 | Filter, Element |
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682-0218-006 | Hose Barb 10-32 |
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682-0249-002 | Valve, Air, 3way Northeast Fluidics Model 2010 |
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682-0352-001 | Nut, Lock |
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682-0352-002 | Washer, Lock |
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682-0354-001 | Rad Bearing Console |
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682-0357-001 | Flanged Bearing |
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6838-9410-0 | Diode, TEM 10D8 1W 800V 25 |
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688-0085-000 | 6-32 1/4 Inch Long |
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688-0407-000 | Screw, Clamp |
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688-0480-000 | Screw |
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690-1298-002 | Filter, PE600 Fibre bundle |
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690-4217-001 | Actuator, Mask transport latch |
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690-4473-001 | Filter, Hepa PE600 |
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698-0215-002 | Valve, load mode Isolator |
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698-0439-003 | Stand Connect RF |
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698-0456-001 | Photomultiplier Hammamatsu |
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698-0786-001 | Actuator Detector cable |
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698-1838-001 | Window Vacuum Chamber |
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698-1867-001 | Friction pad |
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698-1872-001 | Starter Clamp Inductor |
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698-1969-002 | Insulator, Base Plate |
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698-1970-001 | Insulator, chuck ring |
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698-1973-002 | Insulating Sleeves |
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698-1976-002 | Gas Distribution Plate |
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698-2046-001 | Lift Pins |
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698-2157-003 | Insulating Bushing |
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698-2173-003 | Clamping Corner |
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698-2229-001 | Insulating Cap |
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698-2267-001 | Vent Bushing |
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698-2290-001 | Annular Transparent Ring |
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698-2314-001 | Insulator : Bottom |
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698-2381-001 | Insulator, Window |
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698-9061-001 | PCB, ISBC 534 Communication Expansion Board 942-6115-002 |
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698-9062-001 | PCB, CM126A memory |
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698-9105-004 | PCB, Endpoint |
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698-9447-001 | Cable, Assy |
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698-9474-001 | Box Assembly EPD s/n 041 |
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6980803002 | PCB, Driver |
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6981701001 | PCB, Assy. Pneumatic |
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698198002 | Matel O-Ring |
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7190 | Rule, notched UL90 |
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7829561EO1 | Kit, Belt (Motorola seal kit) |
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80-146A | PCB, Vacuum Delay |
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80103D2-30 | PCB, CPU, 86/88, HCIU STD W/O EP, 80103D 80103D2-30 |
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80122C3-04 | SVG Track Interface Board, 80122 or 99-71122A |
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80157F | ATS Controller (Transport Arm) |
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869-8000-002 | Harness Assy 6F Mask Trans |
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901710-002 | Switch, push button, SPDT (Thermco MUX RESET) |
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901975-002 | Valve, Gate, 1 1/2inch opening, Pneumatic, S/Steel, |
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904177-001 | Voltmeter Thermco CVD |
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905109-001 | Gate Valve, Bellows, ASST, 50mm, VLTO |
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906649-001 | Power Supply, CB24-6, 85-132VAC, o/p 24VDC@6.5A, Thermco |
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908596-002 | Heater Jacket, FLA |
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908600-001 | Heater Jacket, FLA |
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90X2731 |
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942-0207.001 | Thermocouple |
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942-0226-001 | Valve, Gas Shut Off, NUPRO SS-4BK V51-1C |
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942-0236-001 | Valve, Ball PM Assy |
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942-0237-001 | Pressure Transducer, Validyne P305D |
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942-0245-001 | Filter |
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942-0251-001 | Fan, from Kooltronic - Motor 7163-2466 |
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942-0252-001 | Fan, Filter |
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942-1014-001 | Magnet Bracket |
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942-1034-001 | Cup Flexure |
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942-1036-001 | Arm Wafer Presence |
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942-1069-001 | Bellows lift and loc |
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942-1173-001 | Spring, Reel Assy |
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942-1282-001 | Bellow Block Housing |
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942-1283-001 | Guide, Bellow Block H 942-2528-101 |
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942-2017-001 | Flexure Wafer ASM |
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942-2023-001 | Lower Finger Part |
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942-2026-001 | Adjusting Nut |
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942-2033-001 | MTG Plate Elevator Shel |
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942-2037-001 | Wafer Present Sensor |
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942-2051-001 | Screw, Cover |
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942-2111-001 | Sensor, Stud Mount |
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942-2112-001 | Magnet Bar Mount |
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942-2113-001 | Sensor, Mount |
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942-2114-001 | Sensor Bracket |
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942-2121-001 | L.S. Trip Bracket |
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942-2194-001 | Electrode Housing |
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942-2197-001 | Clamp |
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942-2198-001 | Electrode Base |
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942-2199-001 | Pin, Electrode |
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942-2200-001 | Electrode House Pin |
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942-2201-001 | Insulator, Electrode |
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942-2204-001 | Gasket |
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942-2206-001 | Feedthrough Housing |
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942-2299-001 | Window |
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942-2386-001 | Union |
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942-5001-300 | Control Auto Zero Box |
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942-5002-300 | PCB, End Stop |
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942-5007-300 | PCB, Servo Position |
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942-5009-300 | PCB, Power Regulator Low |
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942-6112-001 | N2 Purge Valve Assy D2016-S33 10W, 24VDC |
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942-6185-001 | Cable, Chassis to Digital |
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942-6215-001 | PCB |
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942-6326-001 | Solenoid, Elec. Nupro. Angar scientific 4093M224120N0 |
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942-6432-001 | PCB, Memory |
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942-6474-001 | 400KHZ Matching |
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942-6503-001 | Cable, power |
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942-6517-001 | Filter, Strain Gauge |
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942-6518-001 | Filter |
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942-6594-001 A | PCB |
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942-6651-001 | Eprom etc. Set (6 EPROMS + 2 other devices) |
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99-00303 | Pulley, assembly (with bearing) 303 SVG |
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99-04089 | Thermocouple probe |
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99-06635-06 | Air Ring assembly, CTD, 150mm |
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99-14089-02 | Assembly, Micro step DR |
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99-15742-02 | Heater element |
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99-16594-02 | Element, Heater VP |
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99-16883-02 | Assembly, Block HPO MA |
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99-580103-30-001 | PCB, CPU, 86/88, HCIU STD W/O EP, 80103D 80103D2-30 |
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99-80039-07 | Interface, Indexer |
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99-80068 | PCB, Speed control |
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99-80137 | PCB, Handler INTER |
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99-80157-01 | ATS Controller (Transport Arm) |
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99/80000/01 | Assembly, Single .25mA Sensor PCB |
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9980115-01 | Assembly, SPDL CNTL 2T |
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HPO 1 | Thermocouple |
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MV30-1657-60 | Liner, Furnace Mullite |
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OL-327 | Lamp, 28V, 40mA, G1736, OL327 |
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PT-33 | Gasket |
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S100701-01 | Belt, timing 6R3-174037 BEU VTR THERMC |
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Back to Top ^ | |||
SVG THERMCO (AVIZA) | |||
101560-01 | Centering Ring, ISO 80 |
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104090-02 | Spacers .090 thick |
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600768-01 | Switch, Deadman |
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Back to Top ^ | |||